Fully CMOS-Compatible Integrated Distributed Feedback Laser with 250 oC Fabricated Al2O3:Er Gain Medium
نویسندگان
چکیده
Emir Salih Magden1*, Purnawirman1, Nanxi Li1, Gurpreet Singh1, Jonathan D. B. Bradley1, Gale S. Petrich1, Gerald Leake2, Douglas D. Coolbaugh2, Michael R. Watts1, Leslie A. Kolodziejski1 Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, USA College of Nanoscale Science and Engineering, University at Albany, 1400 Washington Ave., Albany, NY 12222, USA *Corresponding Author: [email protected]
منابع مشابه
Monolithically-integrated distributed feedback laser compatible with CMOS processing.
An optically-pumped, integrated distributed feedback laser is demonstrated using a CMOS compatible process, where a record-low-temperature deposited gain medium enables integration with active devices such as modulators and detectors. A pump threshold of 24.9 mW and a slope efficiency of 1.3 % is demonstrated at the lasing wavelength of 1552.98 nm. The rare-earth-doped aluminum oxide, used as t...
متن کاملRare - Earth Doped Aluminum Oxide Lasers for Silicon Photonics by Emir Salih Magden
A reliable and CMOS-compatible deposition process for amorphous Al2O3 based active photonic components has been developed. Al2O3 films were reactively sputtered, where process optimization was achieved at a temperature of 250 C, with a deposition rate of 8.5 nm/min. With a surface roughness of 0.3 nm over a 1 μm area, background optical losses as low as 0.1 dB/cm were obtained for undoped films...
متن کاملBroadband 2-µm emission on silicon chips: monolithically integrated Holmium lasers.
Laser sources in the mid-infrared are of great interest due to their wide applications in detection, sensing, communication and medicine. Silicon photonics is a promising technology which enables these laser devices to be fabricated in a standard CMOS foundry, with the advantages of reliability, compactness, low cost and large-scale production. In this paper, we demonstrate a holmium-doped dist...
متن کاملReliable Silicon Photonic Light Source Using Curved Distributed Feedback Lasers
We propose a curved erbium doped aluminum oxide (Al2O3:Er) distributed feedback (DFB) laser for a reliable integrated photonics light source. The curved structure allows a compensation for radially varying film thickness in Al2O3:Er deposition process. OCIS codes: (130.0130) Integrated optics; (130.3120) Integrated optics devices; (140.3460) Lasers; (130.2790) Guided waves.
متن کاملTowards an Er-doped Si Nanocrystal Sensitized Waveguide Laser – the Thin Line between Gain and Loss
Important progress is being made in the development of a Si based waveguide laser operating at 1.5 μm. The gain medium responsible for the recent progress is Er-doped Si nanocrystal co-doped SiO2, a composite material that can potentially be fabricated using a VLSI compatible process. The material combines the broad absorption spectrum of Si nanocrystals with the efficient narrow linewidth emis...
متن کامل